Our technology

What is MPD?

Micro channel particle deposition (MPD) is a thick-film micro fabrication process where a polymeric stamp is used to transfer ink onto a substrate. MPD requires three components: a substrate, a stamp and an ink.

Loading substrate

The substrate is loaded by an automated wafer handling system onto a wafer chuck in the tool.

Technology step 1 : Loading substrate
Alignment and placement of stamp

The stamp is aligned and accurately placed by the tool on the substrate. The stamp and substrate are in direct contact and seal through adhesive forces.

Technology step 2 : Alignment and placement of stamp
Injection printing material

The ink (printing material) is injected from the top into the stamp and flows through a network of channels into the microchannels that are contained in the stamp and get filled.

Curing process

Once the microchannels are completely filled, the ink is cured by removing the solvent while the stamp is still in contact with the substrate. Thereby, the printed structures become solidified.

Stamp peeling off

Once the ink is cured, the stamp is gently peeled-off by the tool to make sure the printed features remain freestanding on the substrate.

Sintering

Once the stamp is removed, the substrate is sintered at elevated temperature, to remove any binders/polymers and to give the printed material its desired properties (e.g. conductivity, porosity).

What features can you create with MPD?

Micro channel particle deposition (MPD) is a thick-film micro fabrication process where a polymeric stamp is used to transfer ink onto a substrate. MPD requires three components: a substrate, a stamp and an ink.

Width: 2.5 – 500 um

Aspect ratio: 1 – 5

Minimum spacing: 5 – 500 um

Characteristics & Requirement

Printing process

The MPD printing process consists of three main components: a substrate, a polymeric stamp and an ink. These components are loaded into a dedicated and in-house developed MPD tool that cycles thought the various process:

1

Substrate

We can handle wafers ranging in size
from 100 mm (4-inch) up to 200 mm (8-inch)

A large variety of substrates is compatible including silicon, silicon-oxide, glass,
MEMS etc

The process requires low surface roughness below 2 µm. (Ra < um), excluding step-heights

2

Stamp

In-house designed and fabricated by Mesoline depending on customer design & layout

Stamp is recyclable to make MPD cost-effective & sustainable

3

Ink

Micro & nanomaterial particle loaded inks can be used for MPD

The inks are formulated with certain binders, solvents and particle sizes to make it compatible with MPD

Printing materials

Types of materials

These printing materials are commonly used in the MPD process. 

The materials in powder form are formulated into an ink that is compatible with the MPD printing process.

Metal oxide
SnO2
Tin oxide
ZnO
Zink oxide
WO3
Tungsten oxide
CuO
Copper Oxide
Insulators
Glass Frit
Polymers
Metals
Silver
Ag
Gold
Au
Platinum
Pt
Palladium
Pd
Others
Ferrite
Fe3O4
Molecular
Sieves

Multi-Material Printing Capability

Print with up to 4 different materials simultaneously

The MPD process allows for simultaneously printing with up to four different printing materials in a single process step. In other words, once the stamp is in contact with the substrate four different inks can be injected into the stamp and thereby allow to print with four different materials in one go.

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Want to use a different printing material?

Please reach out so we can verify if the MPD process is compatible with your material.

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